Used Products

Super Barrel Asher by EITI

 

System is based on Tegal 965 for up to 6" wafer processing. This super barrel has a completely new set of PC based controls and new electronics provided by National Instruments. This eliminates the hard to find Tegal boards and makes for a much more reliable asher. System can hold up to 100 6" silicon wafers and has 1000 watt rf generator by ENI. Two gas system allows you to run both oxygen and fluorine based gases at the same time. Can be used for removing silicon nitride as well as photoresist ash

Crystal UDT silicon etch system

The Crystal UDT plasma etch system was designed to run an SF6+Oxygen process for etching silicon.

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• Touch Screen system control monitor. PC based software controller
• Cassette to Cassette wafer transfer design w/ optical sense indexers Lam Autoetch Chassis
• Wafer transfer belt design – 4” and 6” wafers         
• Dual Load Lock design-Lam Research Autoetch for easy maintenance       
• Litmus 1200 ICP top source
• ESC lower electrode assembly with “focused bias” design
• AE RFG-1251 13.56 mHz RF generator (bottom power)
• AE AZX-90 Vacuum Cap Matching Network
• AE Mini-panel interface controller
• Lower chamber RF containment housing with N2 purge
• 10 Torr helium backside cooling
• 3KV Applied Technology ESC supply and supporting hardware
• 2 Torr heated front isolated manometer
• 1000 Torr rear reference manometer
• Helical Groove Pump (turbo) for process chamber Osaka
• Fiber optic end point detection system full spectrometer capability
• Point to point wiring harness with prefab serial connection harnesses (A/R) in Panduit wire channel
• Compaq PCI “3U” rack mount CPU control system with rear interface PCB’s
• Single point SMC solenoid bank pneumatics
• Separate AC and DC power distribution boxes
• Orbital weld gas box for use with corrosive gases with SMC solenoid bank
• MFC harness – DB connections
• MFC Configuration (6 gases)
• Small footprint frame design and service accessible
• Service lighting inside tool
• All-in-one ATM/Vacuum sensors for load locks
• DI water and chilled water plumbing
• Keyboard tray
• D-60 or equivalent mechanical pump for loadlocks
• D-30 pump for backing Osaka turbo
• Chiller provided for cooling of electrodes